The Double Beam Laser Interferometer (aixDBLI) for the measurement of d33 offers a proven accuracy (x-cut quartz) up to 0.2 pm/V. The main feature of the system is the ultra fast acquisition time of a few seconds for a single measurement. Based on a new data acquisition algorithm, the measurement speed is enhanced by a factor of 100. This enables for the first time the comparison of electrical and mechanical data for thin films recorded at the same excitation frequency. Due to the the differential measurement principle the influence of sample bending is eliminated, which is the major obstacle using atomic force microscopes (AFM) for these types of measurements.
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aixCMA
aixPES
The TF Analyzer 2000 E is the most sophisticated analyzer of electroceramic material and devices. The test equipment is based on a modular idea, where four different probe heads can be connected to one and the same basic unit. Each of the four probe heads represents a different characterization method.